Han Woong Yoo1, David Brunner1, Thomas Thurner2, Georg Schitter
11:00 - 11:20 | Wed 4 Sep | Room FH 6 | WeB6.4
This paper proposes a MEMS test bench to ensure highly accurate and precise angle measurements for evaluation of multiple MEMS mirrors and analyzes its measurement uncertainty. The MEMS test bench includes a position sensitive detector (PSD) with a motorized stage to convert the beam displacement on the PSD to a mirror angle measurement by a dedicated calibration procedure. Uncertainties in the angle measurement of the MEMS mirrors are analyzed considering the optical alignment, the characterization of the PSD, and the calibration data. By the proposed uncertainty analysis, the accuracy of the developed MEMS test bench shows up to 0.026 degree at the mirror angle of 15 degree.