Trans-Scale Nanofabrication with Nanopositioning and Nanomeasuring Machines

Abstract

Nanofabrication in macroscopic working areas addresses the manipulation with nanometer precision in large scale working areas of several hundred millimeters. In order to reduce the fabrication time of large objects, highly dynamic position tracking is required. The position and orientation of the nanopositioning and nanomeasuring machine have to be controlled permanently to compensate external disturbances like ground motion, sound waves, et cetera. Many applications have strict demands on following the track, e.g. to reduce the line roughness. Highly performant data and signal processing and ecient control algorithms are required to overcome these challenges. This work presents the nanopositioning and measuring machine as well as the utilized control system. Several scanning and fabrication experiments have been carried out in order to demonstrate the performance of the setup.